Innovative Technology
Conventional: Scanning
- Complex
- High maintenance & poor matching
- Slow throughput at high sensitivity
Nanda: One-Shot Technology
- Illuminate & image full wafer at once
- No moving parts
- Best matching & stability
- High throughput AND high sensitivity
Spatial Signature Analysis
- Use automated spatial signature recognition (SSA) to rapidly identify
equipment failure conditions. - Minimize the need for manual review.
- Increase the reliability of the defect classification.
