Rapid Patterned Wafer Inspection
The SPARK System offers ultra fast semi micro inspection of patterned and unpatterned wafers. The innovative One-Shot-Technology allows the system to achieve high throughput at high sensitivity, stability and matching performance:
- 1-3µm sensitivity @ >120 wph on patterned wafers
- 0.5µm sensitivity @ >120 wph on unpatterned wafers
- Edge inspection capability
- Optional back-side inspection
- 5x lower Cost of Ownership
- Low maintenance due to no moving parts during measurement
- Smallest footprint in the industry
- Configurable for 200-300mm wafers
Key Features
- No sampling restriction – inspect 100% of your wafers
- Real-time detection – eliminate time-to-detect excursion
- Built-in signature identification for automated root-cause analysis
- Fast verification post-maintenance
- Accelerate ramp up of new processes
Cost Effective Solution for High Sampling Inspection
High throughput allows 100% wafers/lot inspection. This strategy suggests significant net savings per year using Nanda's technology compared to sampling strategies with existing defect inspection systems.
